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Nano-and micro-electromechanical systems

Lyshevski, Sergey Edward

Nano-and micro-electromechanical systems fundamentals of nano-and microengineering - 2nd - Boca Raton CRC Press 2004 - 722p. 26cm

ISBN: 0849326384

Subjects--Topical Terms:
ELECTRONICS, MICROELECTRONICS,NATOTECHNOLOGY

Dewey Class. No.: 621.381 / LYS

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