Campbell, Stephen  A. <br/><br/>
The science and engineering of microelectrinic fabrication 

 - New Delhi  Oxford university press  1996 
 - xv,536p.  23cm 
<br/><br/><label>ISBN: </label>0195105087 
<br/><br/><label>Subjects--Topical Terms: </label><br/>COMPONENTS AND CIRCUITS
<br/><br/><label>Dewey Class. No.: </label>621.38152  / CAM