Fatikow, S. <br/><br/>
Microsystem technology and microrobotics 

 - New York:  Springer,  1997 
 - xii, 408p.;  24cm. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Applied physics 
<br/><br/><label>Dewey Class. No.: </label>621  / FAT