Lyshevski, Sergey Edward <br/><br/>
Nano-and micro-electromechanical systems  fundamentals of nano-and microengineering 

 - 2nd 
 - Boca Raton  CRC Press  2004 
 - 722p.  26cm 
<br/><br/><label>ISBN: </label>0849326384 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRONICS, MICROELECTRONICS,NATOTECHNOLOGY
<br/><br/><label>Dewey Class. No.: </label>621.381  / LYS