00458 a2200157 4500 0849326384 621.381 LYS 8985 12461 Lyshevski, Sergey Edward Nano-and micro-electromechanical systems fundamentals of nano-and microengineering 2nd Boca Raton CRC Press 2004 2004 722p. 26cm ELECTRONICS, MICROELECTRONICS,NATOTECHNOLOGY PR 37614 37614 0 0 0 0 REF MAIN MAIN REF 2008-10-20 0 621.381LYS 22796 2017-08-28 00:00:00 0.00 2016-10-31 PR 0 0 0 0 REF MAIN MAIN REF 2008-10-20 0 621.381LYS 22475 2017-08-28 00:00:00 0.00 2016-10-31 PR