TY  - GEN
AU  - Lyshevski, Sergey Edward
TI  - Nano-and micro-electromechanical systems: fundamentals of nano-and microengineering
SN  - 0849326384
U1  - 621.381 
PY  - 2004///
CY  - Boca Raton
PB  - CRC Press
KW  - ELECTRONICS, MICROELECTRONICS,NATOTECHNOLOGY
ER  -