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  <titleInfo>
    <title>Fundamentals of semiconductor fabrication</title>
  </titleInfo>
  <name type="personal">
    <namePart>May, Gary S.</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <name type="personal">
    <namePart>Sze, Simon M.</namePart>
  </name>
  <typeOfResource/>
  <originInfo>
    <place>
      <placeTerm type="text">Hoboken</placeTerm>
    </place>
    <publisher>John  Wiley &amp; sons</publisher>
    <dateIssued>2004</dateIssued>
    <dateCreated>2004</dateCreated>
    <issuance/>
  </originInfo>
  <physicalDescription>
    <extent>xiii, 305p. 24cm.</extent>
  </physicalDescription>
  <subject>
    <topic>APPLIED PHSICS</topic>
  </subject>
  <subject>
    <topic>ELECTRONICS</topic>
  </subject>
  <subject>
    <topic>COMPONENTS AND CIRCUITS</topic>
  </subject>
  <classification authority="ddc">621.3815 MAY</classification>
  <identifier type="isbn">981253072X</identifier>
  <recordInfo/>
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