Motamedi, Manouchehr E.  <br/><br/>
MOEMS  micro-opto-electro-mechanical systems 

 - Washington  SPIE press  2005 
 - xxi, 614p.  26cm. 
<br/><br/><label>ISBN: </label>0819450219 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRONIC ENGINEERING<br/>PHYSICS<br/>ELECTRONICS
<br/><br/><label>Dewey Class. No.: </label>621.381  / MOE