TY  - GEN
AU  - Motamedi, Manouchehr E. 
TI  - MOEMS: micro-opto-electro-mechanical systems
SN  - 0819450219
U1  - 621.381 
PY  - 2005///
CY  - Washington
PB  - SPIE press
KW  - ELECTRONIC ENGINEERING
KW  - PHYSICS
KW  - ELECTRONICS
ER  -