Campbell, Stephen A. <br/><br/>
The science and engineering of microeletronic fabrication  

 - 2nd 
 - New York  Oxford University Press  2001 
 - xiv, 603p.  24cm. 
<br/><br/><label>ISBN: </label>0195136055 
<br/><br/><label>Subjects--Topical Terms: </label><br/>SCIENCE<br/>MICROELECTRONIC<br/>ENGINEERING
<br/><br/><label>Dewey Class. No.: </label>621.3815  / CAM