TY  - GEN
AU  - Campbell, Stephen A.
TI  - The science and engineering of microeletronic fabrication 
SN  - 0195136055
U1  - 621.3815 
PY  - 2001///
CY  - New York
PB  - Oxford University Press
KW  - SCIENCE
KW  - MICROELECTRONIC
KW  - ENGINEERING
ER  -