| 000 | 00406 a2200145 4500 | ||
|---|---|---|---|
| 020 | _a0195105087 | ||
| 082 |
_a621.38152 _bCAM |
||
| 090 |
_c3229 _d3978 |
||
| 100 | _aCampbell, Stephen A. | ||
| 245 | _aThe science and engineering of microelectrinic fabrication | ||
| 260 |
_aNew Delhi _bOxford university press _c1996 _g1996 |
||
| 300 |
_axv,536p. _c23cm |
||
| 650 | _aCOMPONENTS AND CIRCUITS | ||
| 942 | _cSR | ||
| 999 |
_c32249 _d32249 |
||