000 00406 a2200145 4500
020 _a0195105087
082 _a621.38152
_bCAM
090 _c3229
_d3978
100 _aCampbell, Stephen A.
245 _aThe science and engineering of microelectrinic fabrication
260 _aNew Delhi
_bOxford university press
_c1996
_g1996
300 _axv,536p.
_c23cm
650 _aCOMPONENTS AND CIRCUITS
942 _cSR
999 _c32249
_d32249