| 000 | 00446 a2200169 4500 | ||
|---|---|---|---|
| 999 |
_c37543 _d37543 |
||
| 003 | WUSLLib | ||
| 008 | 200907b ||||| |||| 00| 0 eng d | ||
| 041 | _aEnglish | ||
| 082 |
_a621 _bFAT |
||
| 100 |
_aFatikow, S. _916522 |
||
| 245 | _aMicrosystem technology and microrobotics | ||
| 260 |
_aNew York: _bSpringer, _c1997 |
||
| 300 |
_axii, 408p.; _c24cm. |
||
| 650 |
_aApplied physics _916523 |
||
| 700 |
_aRembold, U. _916524 |
||
| 942 |
_cSR _2ddc |
||