000 00458 a2200157 4500
020 _a0849326384
082 _a621.381
_bLYS
090 _c8985
_d12461
100 _aLyshevski, Sergey Edward
245 _aNano-and micro-electromechanical systems
_bfundamentals of nano-and microengineering
250 _a2nd
260 _aBoca Raton
_bCRC Press
_c2004
_g2004
300 _a722p.
_c26cm
650 _aELECTRONICS, MICROELECTRONICS,NATOTECHNOLOGY
942 _cPR
999 _c37614
_d37614