| 000 | 00458 a2200157 4500 | ||
|---|---|---|---|
| 020 | _a0849326384 | ||
| 082 |
_a621.381 _bLYS |
||
| 090 |
_c8985 _d12461 |
||
| 100 | _aLyshevski, Sergey Edward | ||
| 245 |
_aNano-and micro-electromechanical systems _bfundamentals of nano-and microengineering |
||
| 250 | _a2nd | ||
| 260 |
_aBoca Raton _bCRC Press _c2004 _g2004 |
||
| 300 |
_a722p. _c26cm |
||
| 650 | _aELECTRONICS, MICROELECTRONICS,NATOTECHNOLOGY | ||
| 942 | _cPR | ||
| 999 |
_c37614 _d37614 |
||