| 000 | 00467 a2200181 4500 | ||
|---|---|---|---|
| 020 | _a981253072X | ||
| 082 |
_a621.3815 _bMAY |
||
| 090 |
_c14677 _d21856 |
||
| 100 | _aMay, Gary S. | ||
| 245 | _aFundamentals of semiconductor fabrication | ||
| 260 |
_aHoboken _bJohn Wiley & sons _c2004 _g2004 |
||
| 300 |
_axiii, 305p. _c24cm. |
||
| 650 | _aAPPLIED PHSICS | ||
| 650 | _aELECTRONICS | ||
| 650 | _aCOMPONENTS AND CIRCUITS | ||
| 700 | _aSze, Simon M. | ||
| 942 | _cSR | ||
| 999 |
_c42847 _d42847 |
||