| 000 | 00441 a2200169 4500 | ||
|---|---|---|---|
| 020 | _a0819450219 | ||
| 082 |
_a621.381 _bMOE |
||
| 090 |
_c24692 _d40909 |
||
| 100 |
_aMotamedi, Manouchehr E. _eed. |
||
| 245 |
_aMOEMS _bmicro-opto-electro-mechanical systems |
||
| 260 |
_aWashington _bSPIE press _c2005 _g2005 |
||
| 300 |
_axxi, 614p. _c26cm. |
||
| 650 | _aELECTRONIC ENGINEERING | ||
| 650 | _aPHYSICS | ||
| 650 | _aELECTRONICS | ||
| 942 | _cL | ||
| 999 |
_c51755 _d51755 |
||