| 000 | 00472 a2200181 4500 | ||
|---|---|---|---|
| 020 | _a0195136055 | ||
| 082 |
_a621.3815 _bCAM |
||
| 090 |
_c28460 _d49632 |
||
| 100 | _aCampbell, Stephen A. | ||
| 245 | _aThe science and engineering of microeletronic fabrication | ||
| 250 | _a2nd | ||
| 260 |
_aNew York _bOxford University Press _c2001 _g2001 |
||
| 300 |
_axiv, 603p. _c24cm. |
||
| 650 | _aSCIENCE | ||
| 650 | _aMICROELECTRONIC | ||
| 650 | _aENGINEERING | ||
| 942 | _cPR | ||
| 999 |
_c55089 _d55089 |
||