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The science and engineering of microeletronic fabrication

Campbell, Stephen A.

The science and engineering of microeletronic fabrication - 2nd - New York Oxford University Press 2001 - xiv, 603p. 24cm.

ISBN: 0195136055

Subjects--Topical Terms:
SCIENCE
MICROELECTRONIC
ENGINEERING

Dewey Class. No.: 621.3815 / CAM

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