The science and engineering of microeletronic fabrication (Record no. 55089)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00472 a2200181 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0195136055 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3815 |
| Item number | CAM |
| 090 ## - | |
| -- | 28460 |
| -- | 49632 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Campbell, Stephen A. |
| 245 ## - TITLE STATEMENT | |
| Title | The science and engineering of microeletronic fabrication |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | New York |
| Name of publisher, distributor, etc | Oxford University Press |
| Date of publication, distribution, etc | 2001 |
| Date of manufacture | 2001 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiv, 603p. |
| Dimensions | 24cm. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | SCIENCE |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | MICROELECTRONIC |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | ENGINEERING |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Permanent Reference Materials |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Cost, replacement price | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Permanent Reference Collection | Main Library | Main Library | Reference Section | 06/11/2012 | 621.3815CAM | 21542 | 28/08/2017 | 0.00 | 31/10/2016 | Permanent Reference Materials | |||||
| Schedule Reference Collection | Main Library | Main Library | Reference Section | 19/11/2012 | 621.3815CAM | 21541 | 31/08/2017 | 0.00 | 31/10/2016 | Schedule Reference Materials | |||||
| Schedule Reference Collection | Main Library | Main Library | Reference Section | 30/09/2015 | 621.3815CAM | 11908 | 31/08/2017 | 0.00 | 31/10/2016 | Schedule Reference Materials |